Micro and Nano Fabrication: Tools and Processes
  • Published Year: 2015
  • Page count: 537
  • File Size: 22 MB
  • Language: English
  • Published by: Springer-Verlag Berlin Heidelberg
  • Visited by: 288
  • Rating/Review: 4.5
  • ISBN: 978-3-662-44394-1
    978-3-662-44395-8

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Micro and Nano Fabrication: Tools and Processes

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For Microelectromechanical Systems (MEMS) and Nanoelectromechanical Systems (NEMS) production, each product requires a unique process technology. This book provides a comprehensive insight into the tools necessary for fabricating MEMS/NEMS and the process technologies applied. Besides, it describes enabling technologies which are necessary for a successful production, i.e., wafer planarization and bonding, as well as contamination control.

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