Published Year: 2015
Page count: 537
File Size: 22 MB
Language: English
Published by: Springer-Verlag Berlin Heidelberg
Visited by: 32
Rating/Review: 4.5
ISBN: 978-3-662-44394-1
978-3-662-44395-8

Keywords:

تندتک

در این کانال تلگرام، مسعود بیگی، تجربیات خود را از دنیای تکنولوژی، استارتاپ، کارآفرینی و مدیریت فنی با شما به اشتراک می گذارد

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Micro and Nano Fabrication: Tools and Processes

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Intermediate Artificial Intelligence (AI) English

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For Microelectromechanical Systems (MEMS) and Nanoelectromechanical Systems (NEMS) production, each product requires a unique process technology. This book provides a comprehensive insight into the tools necessary for fabricating MEMS/NEMS and the process technologies applied. Besides, it describes enabling technologies which are necessary for a successful production, i.e., wafer planarization and bonding, as well as contamination control.

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Authors:

Jürg Leuthold

Reviews:

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