Surface and thin film processes are crucial in understanding current and future electronic, magnetic, optical and chemical devices. This book …
This second edition, edited by the world-renowned Dr. Rointain Bunshah, is an extensive update of the many improvements in deposition …
For Microelectromechanical Systems (MEMS) and Nanoelectromechanical Systems (NEMS) production, each product requires a unique process technology. This book provides a …
