Implications of Intelligent, Integrated Microsystems for Product Design and Development
Myers D.R.,McWhorter P.J.,Converse C.
2000
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Hans H. Gatzen,Volker Saile,Jürg Leuthold
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For Microelectromechanical Systems (MEMS) and Nanoelectromechanical Systems (NEMS) production, each product requires a unique process technology. This book provides a comprehensive insight into the tools necessary for fabricating MEMS/NEMS and the process technologies applied. Be
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