Implications of Intelligent, Integrated Microsystems for Product Design and Development
Myers D.R.,McWhorter P.J.,Converse C.
2000
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English
Intermediate
Artificial Intelligence (AI)
Micro and Nano Fabrication: Tools and Processes
Hans H. Gatzen,Volker Saile,Jürg Leuthold
4.5 / 5
0 reviews
2015
Published
537
pages
302
views
For Microelectromechanical Systems (MEMS) and Nanoelectromechanical Systems (NEMS) production, each product requires a unique process technology. This book provides a comprehensive insight into the tools necessary for fabricating MEMS/NEMS and the process technologies applied. Be
About this book
For Microelectromechanical Systems (MEMS) and Nanoelectromechanical Systems (NEMS) production, each product requires a unique process technology. This book provides a comprehensive insight into the tools necessary for fabricating MEMS/NEMS and the process technologies applied. Besides, it describes enabling technologies which are necessary for a successful production, i.e., wafer planarization and bonding, as well as contamination control.
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