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Cover of Micro and Nano Fabrication: Tools and Processes

Book guide and evaluation

Micro and Nano Fabrication: Tools and Processes

Hans H. Gatzen,Volker Saile,Jürg Leuthold

English Intermediate Artificial Intelligence (AI)
4.5 / 5

0 reviews

2015

Published

537

pages

303

views

For Microelectromechanical Systems (MEMS) and Nanoelectromechanical Systems (NEMS) production, each product requires a unique process technology. This book provides a comprehensive insight into the tools necessary for fabricating MEMS/NEMS and the process technologies applied. Be

#Microfabrication#Nanofabrication#Lithography#Etching#Deposition

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For Microelectromechanical Systems (MEMS) and Nanoelectromechanical Systems (NEMS) production, each product requires a unique process technology. This book provides a comprehensive insight into the tools necessary for fabricating MEMS/NEMS and the process technologies applied. Besides, it describes enabling technologies which are necessary for a successful production, i.e., wafer planarization and bonding, as well as contamination control.

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