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Cover of Introduction to Microsystem Design
English Intermediate Artificial Intelligence (AI)

Introduction to Microsystem Design

Werner Karl Schomburg (auth.)

Werner Karl Schomburg (auth.)

4.5 / 5

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2011

Published

342

pages

274

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The book describes the design of micro systems systematically as well as the equations needed for an estimation of the basic elements. It can be used without knowing fabrication processes of micro systems and provides the basic equations needed to calculate the effects and forces

About this book

The book describes the design of micro systems systematically as well as the equations needed for an estimation of the basic elements. It can be used without knowing fabrication processes of micro systems and provides the basic equations needed to calculate the effects and forces which are important in micro systems.For quick reference equations are presented in tables which are found in an index at the end of this book.

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