Smart sensors and MEMS: Intelligent devices and microsystems for industrial applications

Smart sensors and MEMS can include a variety of devices and systems that have a high level of functionality. They may integrate sensing and actuating with information processing, analog-to-digital conversion and memory functions. Smart sensors and MEMS may respond to algorithmic instructions and calibration requests, allowing smart devices to become more autonomous as they provide self-diagnostics and self-correction. Intelligence enables adaptation, which in turn increases the reliability and longevity of the smart device and this can significantly reduce costs. Part one covers smart sensors including capacitive, inductive, resistive and image sensors. Part two covers smart MEMS, including power MEMS, RF MEMS, inertial MEMS, and MEMS print heads.